11.09.2015

Faculty of Mathematics and Science-Department of Physics

Name Device Group Description Website Amount Contact Available For External Use Device Owner
E-line E-beam Lithography/SEM E-beam lithography tool, Scanning electron microscope (SEM). https://www.jyu.fi/science/muut_yksikot/nsc/en/research/facilities/instruments/details/e_line 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
LEO 1430 E-beam Lithography/SEM Scanning electron microscope (SEM) + e-beam lithography. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/Leo1430 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
JSM-840A E-beam Lithography/SEM Scanning electron microscope (SEM) + e-beam lithography. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/jeoljsm840 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
Benchmark RFX-600 PC-5100 RIE (Reactive Ion Etchers) Basic manually operated RIE. Available gases: Ar, O2, SF6 https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/axicrie 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
Plasmalab80Plus RIE (Reactive Ion Etchers) RIE, available process gases: Ar, O2, SF6, CHF3 https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/plasmalab 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
Plasmalab80Plus PECVD CDV (Chemical Vapor Deposition) CVD, available process gases: N2, N2O, NH3, CH4, SiH4/N2, CF4/O2 https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/plasmalab 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
Baltec BAE 250 Vacuum Evaporators E-beam evaporator, mainly used for dirty" materials." https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/balzers250 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
UHV evaporator Vacuum Evaporators Ultra-high vacuum e-beam evaporator. Cryo-torr 8 pump, Telemark TT 10 e-beam gun + Ion Gun in loading chamber (Tectra IonEtch Genll) https://www.jyu.fi/science/muut_yksikot/nsc/en/research/facilities/instruments/details/uhv_evaporator 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
AUTO 306 Vacuum Evaporators Vacuum evaporator with e-beam and thermal source. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/edwards306 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
TFS200 Atomic Layer Deposition ALD reactor with plasma head.Has a X-ray fluorescence analysis system in the loadlock. Available processes as of August 2015: Al2O3, AlN, Al, ZnO, Zn3N2, Zn, TiO2, TiN, Ti, WO3, WxN, CaO/CaCO3, Ca5(PO4)3(OH), SiO2 https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/beneqald 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
JFC-1100 Sputters Small sputtering machine for Au coating https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/jeol1100 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
Pulsed laser deposition system Sputters Setup built in-house. Able to grow high quality NbN films, for example. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/pldselfmade 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
F&K; Delvotek 5430 Wirebonder empty https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/delvotec 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
K&S; 4523A Wirebonder Deep access, 25 um Al and Au wire. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/kulicke4523 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
MA45 UV Mask Aligner Mask aligner for UV photolithography. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/karlsuss45 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
Photonic Professional 3D Lithography Pattern 3D structures by laser. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/nanoscribe 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
AUTO EL III Ellipsometer Measure thickness of thin films https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/rudolphauto 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
KLA Tencor P-15 Profilometer Stylus profiler- vertical resolution 2 Å, horisontal limited by tip''''''''''''''''''''''''''''''''''''''''''''''''''''''''''''''''s 2um diameter. vertical scale 320um. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/p-15-profiler 1 mikko.i.laitinen@jyu.fi True University of Jyväskylä
CTF/12/65/55 Furnaces Process gases: O2, N2, Ar. Used mainly for Si oxidation. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/carbolite12 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
GSL-1100X Furnaces Production of carbon nanotubes and graphene. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/gsl1100 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
MicroAce 3 Dicing saw Cut silicon wafers. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/microace3 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
HLT260 Leak Detector Detect leaks using He gas. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/hlt260 1 kimmo.m.kinnunen@jyu.fi True University of Jyväskylä
89410A Signal Analyzer DC-10MHz Vector Signal Analyzer https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/agilentanalyzer 1 kimmo.m.kinnunen@jyu.fi True University of Jyväskylä
37369D Signal Analyzer Vector Network Analyzer https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/Anritsu37369 1 kimmo.m.kinnunen@jyu.fi True University of Jyväskylä
MP1763C Signal generators pulse pattern generator https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/Anritsu1763c 1 kimmo.m.kinnunen@jyu.fi True University of Jyväskylä
68387C Signal generators Synthesized signal generator https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/Anritsu68367 1 kimmo.m.kinnunen@jyu.fi True University of Jyväskylä
3362 Signal generators arbitrary waveform generator https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/tabor3362 1 kimmo.m.kinnunen@jyu.fi True University of Jyväskylä
BX51M Optical Microsopes With nanomanipulator and ASI MPPI-2 injector https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/olympusbx51nano 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
BX51M Optical Microsopes with camera, spectrometer https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/bx51setup 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
Leica Z16 APO Optical Microsopes Optical zoom microscope, resolution 1500 lp/mm https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/leicaz16 1 Joni Parkkonen False University of Jyväskylä
Skyscan 1172 X-ray Microtomography X-ray microtomography device https://www.jyu.fi/science/muut_yksikot/nsc/en/research/facilities/instruments/details/x_raytomo 1 Joni Parkkonen False University of Jyväskylä
Xradia MicroXCT-400 X-ray Microtomography X-ray microtomography device https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/xradiamicro400 1 Joni Parkkonen False University of Jyväskylä
Xradia NanoXCT-100 X-ray Nanotomography X-ray nanotomography device https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/xradianano100 1 Joni Parkkonen False University of Jyväskylä
Optical spectroscopy, Kretschmann/ATR –setup Optical Spectrometers Measurement setup built in-house. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/kretschmann 1 jussi.toppari@jyu.fi False University of Jyväskylä
HumiSys Relative Humidity Generator uncategorized devices Humidity generator, max flow 2 l/min https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/humisys 1 Joni Parkkonen False University of Jyväskylä
Sensapex Micromanipulation System uncategorized devices Micromanipulation system including two manipulators and one controller. Minimum step size 50 nm. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/sensamic 1 Joni Parkkonen False University of Jyväskylä
Material testing stage uncategorized devices Testing stage for stretching and compressing small samples. Max force 44 N. Can be used together with SkyScan1172 and Xradia MicroXCT-400 tomography devices. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/skyscanmat 1 Joni Parkkonen False University of Jyväskylä
QuikLaze50 Lazer Cutting System uncategorized devices Laser micromachining system. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/quicklaze 1 Joni Parkkonen False University of Jyväskylä
Suurnopeuskamera MotionPro X3 uncategorized devices High speed camera https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/motionprox3 1 Roope Lehto, Joni Parkkonen True University of Jyväskylä
Kelvinox MX400 Cryostats Dilution refrigerator, base temperature ~7 mK. https://www.jyu.fi/science/muut_yksikot/nsc/en/research/facilities/instruments/details/kelvinox 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
PDR dilution refigerators Cryostats Small dilution refrigerator, base temperature ~50 mK. Fits inside standard liquid helium storage dewar. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/pdrself 5 kimmo.m.kinnunen@jyu.fi True University of Jyväskylä
HPD Denali 102 ADR Cryostats Cryogen-free Adibatic Demagnetization Refrigerator https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/denali102 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
Cryogenic X-ray spectrometer Setups built for specific purpose Cryogen-free adiabatic demagnetization refrigerator with state-of-the-art cryogenic X-ray detectors. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/xrayspec 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
Frequency dependent impedance spectroscopy Setups built for specific purpose Measurement setups built in-house. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/impedancesetup 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
EM Noise Shielded Measurement Rooms Shielded Rooms Measurement rooms shielded against electromagnetic interference. Equipped with various measurement setups. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/emsroom 7 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
K130 accelerator + peripheral devices Particle Accelerators Variabl- energy, multi-particle accelerator. K-value 130 MeV. https://www.jyu.fi/fysiikka/en/research/accelerator/accelerator/index_html/accelerator/accelerator/k130/ 1 jaana.k.kumpulainen@jyu.fi pauli.heikkinen@jyu.fi False University of Jyväskylä
MCC30 accelerator + peripheral diveces Particle Accelerators H-/d- cyclotron. E(p) = 18 - 30 MeV, E(d)= 9 - 15 MeV https://www.jyu.fi/fysiikka/en/research/accelerator/accelerator/index_html/mcc30 1 jaana.k.kumpulainen@jyu.fi pauli.heikkinen@jyu.fi False University of Jyväskylä
NEC 5SDH-II Pelletron accelerator + three ion sources Particle Accelerators 1.7 MV tandem accelerator, producing beam energies up to 3.4 MeV for H and about 20 MeV for Au from three ion sources https://www.jyu.fi/fysiikka/en/research/accelerator/abasedmat/Facilities 1 mikko.i.laitinen@jyu.fi , timo.sajavaara@jyu.fi True University of Jyväskylä
Time-of-flight elastic recoil detection analysis (TOF-ERDA) spectrometer Ion beam analysis Thin film analysis of light elements on heavy substrate. Depth profiling all elements on the sample starting from hydrogen https://www.jyu.fi/fysiikka/en/research/accelerator/abasedmat/research/characterizations/tof-erda 1 mikko.i.laitinen@jyu.fi , timo.sajavaara@jyu.fi True University of Jyväskylä
Rutherford backscattering spectrometry (RBS) setup Ion beam analysis Thin film elemental analysis. Heavy elements on light substrate. https://www.jyu.fi/fysiikka/en/research/accelerator/abasedmat/research/characterizations/rbs 1 mikko.i.laitinen@jyu.fi , timo.sajavaara@jyu.fi True University of Jyväskylä
Particle induced x-ray emission (PIXE) setup (in vacuum or air measurem.) Ion beam analysis Elemental analysis of art, cultural heritage, geology, material science etc. https://www.jyu.fi/fysiikka/en/research/accelerator/abasedmat/research/characterizations/PIXE_folder 1 mikko.i.laitinen@jyu.fi , timo.sajavaara@jyu.fi True University of Jyväskylä
6.4 GHz ECR ion source unit (including extraction system and the mass separator) Ion sources for cyclotrons and related instruments Ion source for heavy ions https://www.jyu.fi/fysiikka/en/research/accelerator/ionsources/ecr1_html/ 1 hannu.koivisto@phys.jyu.fu False University of Jyväskylä
14 GHz ECR ion source unit (including extraction system and the mass separator) Ion sources for cyclotrons and related instruments Ion source for heavy highly charged ions https://www.jyu.fi/fysiikka/en/research/accelerator/ionsources/ecr2_html/ 1 hannu.koivisto@phys.jyu.fi False University of Jyväskylä
LIISA light ion source unit Ion sources for cyclotrons and related instruments Filament driven light ion source for H- and d- https://www.jyu.fi/fysiikka/en/research/accelerator/ionsources/liisa_html/ 1 hannu.koivisto@phys.jyu.fi False University of Jyväskylä
RADIS ion source test bench Ion sources for cyclotrons and related instruments empty https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/RADIS 1 hannu.koivisto@phys.jyu.fi False University of Jyväskylä
2.45 GHz microwave ion source unit (for R&D;) Ion sources for cyclotrons and related instruments empty https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/245ionsource 1 hannu.koivisto@phys.jyu.fi False University of Jyväskylä
RADEF facility for high-energy ion irradiation effects of electronics Facilities for studying radiation effects and ion-matter interactions empty https://www.jyu.fi/fysiikka/en/research/accelerator/radef 1 heikki.i.kettunen@jyu.fi False University of Jyväskylä
Time-of-flight setup for stopping force and energy straggling measurements Facilities for studying radiation effects and ion-matter interactions empty empty 1 Heikki Kettunen False University of Jyväskylä
GREAT, Spectrometer at the RITU focal plane Facilities for nuclear physics research empty https://www.jyu.fi/fysiikka/en/research/accelerator/nucspec/GREAT/ 1 catherine.scholey@jyu.fi False UK Universities
TDR(DAQ), Triggerless data acquisition system (second image) Facilities for nuclear physics research empty empty 1 Paul Greenlees False UK Universities
DPUNS (Differential Plunger for Unbound Nuclear States), Plunger device Facilities for nuclear physics research empty https://www.jyu.fi/fysiikka/en/research/accelerator/nucspec/dpuns 1 tuomas.grahn@jyu.fi False University of Jyväskylä
LISA, Light Ion Spectrometer Array Facilities for nuclear physics research empty https://www.jyu.fi/fysiikka/en/research/accelerator/nucspec/lisa 1 tuomas.grahn@jyu.fi False University of Liverpool
SAGE, Silicon and GErmanium array Facilities for nuclear physics research empty https://www.jyu.fi/fysiikka/en/research/accelerator/nucspec/sage/ 1 paul.greenlees@jyu.fi False Univ. of Liverpool, STFC Daresbury Laboratory, University of Jyväskylä
JUROGAMII, Gamma-ray array Facilities for nuclear physics research empty https://www.jyu.fi/fysiikka/en/research/accelerator/nucspec/jurogam 1 paul.greenlees@jyu.fi False Gamma Pool
MARA (Mass Analyzing Recoil Apparatus), Facilities for nuclear physics research Vacuum-mode recoil separator with focal plane detectors https://www.jyu.fi/fysiikka/en/research/accelerator/nucspec/MARA/ 1 juha.uusitalo@jyu.fi False University of Jyväskylä
Orion Nanofab Microscope, FIB, lithography tool Helium ion microscope with Raith pattern generator for lithography. FIB with He and Ne gases. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/zeissnanofab 1 kai.arstila@jyu,.fi , kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
Dimension 3100 (NanoScope IV) atomic force microscope Atomic force microscope (AFM) https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/nanoscope4 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
PSIA XE-100 atomic force microscope Atomic force microscope, modified: environmental chamber. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/psiaxe100 1 kimmo.m.kinnunen@jyu.fi True University of Jyväskylä
CCR-10 probe station Cryogenic probe station, base temperature 10 K. Measurement probes for a wide range of applications. Can be connected to the Weiss environmental chamber for precise atmosphere control. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/janis10 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
WTK-180 environment control Environmental test chamber. Precise control of temperature and humidity. https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments 1 kimmo.m.kinnunen@jyu.fi False University of Jyväskylä
Vacuum/inert gas furnace Furnaces In vacuum and inert gases up to 1100 C, atmosphere up to 1700C 1 mikko.i.laitinen@jyu.fi True University of Jyväskylä
R&S; ZVL Signal Analyzer Vector Network Analyzer 1 arto.s.lassila@jyu.fi False University of Jyväskylä
IGISOL + Penning trap + lasers Facilities for nuclear physics research Ion guide based isotope separator to produce low-energy (30 keV) beams of exotic isotopes coupled with a Penning trap setup for precision atomic mass measurements and laser setup for resonance ionization https://www.jyu.fi/fysiikka/en/research/accelerator/igisol 1 ari.jokinen@jyu.fi False University of Jyväskylä
RITU (Recoil Ion Transport Unit) Facilities for nuclear physics research Gas-filled recoil separator https://www.jyu.fi/fysiikka/en/research/accelerator/nucspec/RITU 1 juha.uusitalo@jyu.fi False University of Jyväskylä
Varian CLINAC Particle Accelerators Electron accelerator for electronics radiation damage tests (Formerly for radiation therapy) https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/clinac 1 heikki.i.kettunen@jyu.fi False
Dimension Icon atomic force microscope Atomic force microscope. Installed options: TUNA module, Kelvin probe https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/Brukericon 1 kimmo.m.kinnunen@jyu.fi j.jussi.toppari@jyu.fi False University of Jyväskylä
MultiMode 8 atomic force microscope Atomic force microscope https://www.jyu.fi/science/muut_yksikot/nsc/en/facilities/instruments/details/brukermulti8 1 kimmo.m.kinnunen@jyu.fi j.jussi.toppari@jyu.fi False University of Jyväskylä